Clean/Low-Particle Generation 10-/11-/12-/13-/21-/22-
Prevents particle generation in a clean room.
Particle generation from the equipment is leveled from Grade 1 to 4. Can be selected based on the cleanliness class of the clean room.
Fluorine grease is used.
Products are sealed and shipped in anti-static double bags.
Suitable for environments where the presence of copper, fluorinre or silicon materials ie restricked.
Lithum soap base grease is used.
Construction is the same as the clean series.
Standard packaging (Duplicate packaging is not used.)