Home HIGH VACUUM EQUIPMENT Slit Valve XGT SMC Product

Slit Valve XGT SMC Product

Description

Slit Valve XGT

 

Series/CAD Operating
pressure
range (Pa)
Fluid Gate size
(Height x Width)
(mm)
Operating
pressure
(MPa)
XGT

Atmospheric
pressure to
1×10-6
Inert gas type
vacuum
32 x 222
46 x 236
50 x 336
0.45 to 0.6

Features

   Suitable for use as a block disk between the load lock chamber and transfer chamber, or the transfer chamber and process chamber, of semiconductor equipment